CSManufacturing &madsh; Concept Systems Manufacturing
Novellus Concept One
- Novellus
- Concept
- One Concept 1
- NVLS
- CVD
- Refurbished Novellus Equipment
Concept One—150 CVD System
Concept One 150mm Base System
- Micro—Contamination Package.
- Dual Frequency System with AE LF PDX 1400 Generator — CE Mark.
- New Generation Process 150mm Gas Box, 9 Channel, Aera 7800 Mfc's.
- Standard Slot 150mm Heater Block.
- Assy Foot Switch Controller
- VCR Gasline Interconnect.
- Megapak Power Supply.
- Sapphire Window.
- One Piece Loadlock Door Shaft.
- Standard Front Facia — Aqueous paint.
- End Point Detector — Dual Head.
- SECS II communications interface.
- AE LF & HF Generators.
- AC Remote Pump Interface for ACP pumps and with AE LF Generator.
- Main System Control Cable CA 99
- RF Generator Control Cables for AE Generators
- HF RF Cable for 3 KW generator CA 57
- LF RF Cable CA 102
- Pump Control Cable to be used with ACP type interfaces
Standard Novellus BKM
Concept One—200 CVD System
- Concept One 200mm Base System.
- Micro—Contamination Package.
- Dual Frequency System with AE LF PDX 1400 Generator — CE Mark.
- New Generation Process 200mm Gas Box, 11 Channel, Aera 7800 Mfc's.
- Standard Slot 200mm Heater Block.
- Assy, Foot Switch Controller
- VCR Gasline Interconnect.
- Megapak Power Supply.
- Sapphire Window.
- One Piece Loadlock Door Shaft.
- Standard Front Facia — Aqueous paint.
- End Point Detector — Dual Head.
- AE RFG5500 2.75 KW HF Generator — CE Marked, interlock standard.
- AC Remote Pump Interface for ACP pumps and with AE LF Generator.
- Main System Control Cable CA 99
- RF Generator Control Cables for AE Generators
- HF RF Cable for 3 KW generator CA 57
- LF RF Cable CA 102
- Pump Control Cable to be used with ACP type interfaces