Upgrades & Enhancements

• Standard Upgrades and Enhancements

  • • Micro-Contamination Package.
  • • AE LF & HF Generators.
  • • New Generation Process Gas Box
  •       Aera 7800 Mfc's.
  •       Lock out – Tag out
  • • External Heated Pendulum Valve.
  • • 586 Computer with Flash Drive.
  • • Digital Pressure/Temperature Control Unit.
  • • Robot with 70V Motors and OEM 750 Driver Kit.
  • • Front Flat Panel Touchscreen.
  • • AC and RF Ceramic Feedthru's.
  • • Dual Head End Point Detector.
  • • New Generation Terminal Panel
  • • Brand New Process Environment – Including but not limited to:
  •       Top Plate
  •       Bottom plate
  •       Heater block
  •       Shower heads
  •       Gas Distribution
  •       Brand new Ceramics
  •       All weldments and all delivery lines.
  • • Brand New Power Distribution
  •       Upgraded Remote
  •       Upgraded Main
  •       Upgraded Upper and Lower
  • • Customer Specified Configuration.

• Optional Enchancements

  • • Cool Station Upgrade
  •       Change to plastic cassettes, saves switching cassettes.
  • • Ferrofluidic Seal Upgrade
  •       Improves Reliability & Maintainability
  • • RF Strap
  •       Provides higher availability through less maintenance
  • • Ceramic Bottom Plate
  •       Lowers usage due to spindle forks drooping
  • • MCA Heater Block
  •       Backside Particle Reduction
  •       (not process transparent)
  • • Light Tower
  • • TEOS upgrades available