Mephisto - Hometag:csmanufacturing.net,2009:mephisto/Mephisto Noh-Varr2008-07-11T22:25:12Zadmintag:csmanufacturing.net,2008-07-11:42008-07-11T22:25:00Z2008-07-11T22:25:12ZProduct
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<h2> Novellus Concept One </h2>
<ul>
<li class="pro2">
<h3>Concept One-150 CVD System</h3><br />
<img class="c1" src="images/conceptimg.jpg">
<p> This is CSM’s standard default configuration. This system is fully refurbished in partnership with Novellus Systems using standard OEM hardware and to meet standard OEM BKM Process. This system or module will perform "equivalent to new". </p><br /><br /><br />
<p>
<h3>Standard Components</h3>
Concept One 150mm Base System.<br />
Micro-Contamination Package.<br />
Dual Frequency System with AE LF PDX 1400 Generator - CE Mark.<br />
New Generation Process 150mm Gas Box, 9 Channel, Aera 7800 Mfc's.<br />
Standard Slot 150mm Heater Block.<br />
Assy, Foot Switch Controller - switch is foot activated for closure of the loadlock door.<br />
VCR Gasline Interconnect.<br /><br />
Sapphire Window.<br />
One Piece Loadlock Door Shaft.<br />
Standard Front Facia - Aqueous paint.<br />
End Point Detector - Dual Head.<br />
SECS II communications interface.<br />
AE LF & HF Generators.<br />
AC Remote Pump Interface for ACP pumps and with AE LF Generator.<br />
Main System Control Cable CA 99 - 41 ft.<br />
RF Generator Control Cables for AE Generators - 20 ft.<br />
HF RF Cable for 3 KW generator CA 57 - 35 ft.<br />
LF RF Cable CA 102 - 35 ft.<br />
Pump Control Cable to be used with ACP type interfaces - 10 ft.<br />
</p><br />
<p>
<h3>Upgraded Components</h3>
External Heated Pendulum Valve.<br />
586 Computer with Flash Drive.<br />
Pressure/Temperature Control Unit.<br />
Robot with 70V Motors and OEM 750 Driver Kit.<br />
Front Flat Panel Touchscreen.<br />
AC and RF Ceramic Feedthru's.<br />
</p><br />
<p>The base system does not include certain peripheral and support items, including but not limited to vacuum backing pumps, metrology tools, test wafers, effluent treatment units, chemical/supplies. Base system features listed may be replaced, added to, and/or modified due to customer specific requests. The system depicted may contain modifications and options to the base system.</p><br />
<p><b>Installation:</b> System installation to Standard Novellus BKM</p><br />
</li>
<li>
<h3>Concept One-200 CVD System</h3><br />
<img class="c1" src="images/conceptimg.jpg">
<p> This is CSM’s standard default configuration. This system is fully refurbished in partnership with Novellus Systems using standard OEM hardware and to meet standard OEM BKM Process. This system or module will perform "equivalent to new". </p><br /><br /><br />
<p>
<h3>Standard Components</h3>
Concept One 200mm Base System.<br />
Micro-Contamination Package.<br />
Dual Frequency System with AE LF PDX 1400 Generator - CE Mark.<br />
New Generation Process 200mm Gas Box, 11 Channel, Aera 7800 Mfc's. <br />
Standard Slot 200mm Heater Block.<br />
Assy, Foot Switch Controller - switch is foot activated for closure of the loadlock door.<br />
VCR Gasline Interconnect.<br />
Megapak Power Supply.<br />
Sapphire Window.<br />
One Piece Loadlock Door Shaft.<br />
Standard Front Facia - Aqueous paint.<br />
End Point Detector - Dual Head.<br />
AE RFG5500 2.75 KW HF Generator - CE Marked, interlock standard.<br />
AC Remote Pump Interface for ACP pumps and with AE LF Generator.<br />
Main System Control Cable CA 99 - 41 ft.<br />
RF Generator Control Cables for AE Generators - 20 ft.<br />
HF RF Cable for 3 KW generator CA 57 - 35 ft.<br />
LF RF Cable CA 102 - 35 ft.<br />
Pump Control Cable to be used with ACP type interfaces - 10 ft.
</p><br />
<h3>Upgraded Components</h3>
Upgraded External Heated Pendulum Valve.<br />
586 Computer with Flash Drive.<br />
Digital Pressure/Temperature Control Unit.<br />
Robot with 70V Motors and OEM 750 Driver Kit.<br />
Front Flat Panel Touchscreen.<br />
AC and RF Ceramic Feedthru's.
</p><br />
<p>The base system does not include certain peripheral and support items, including but not limited to vacuum backing pumps, metrology tools, test wafers, effluent treatment units, chemical/supplies. Base system features listed may be replaced, added to, and/or modified due to customer specific requests. The system depicted may contain modifications and options to the base system.</p><br />
<p><b>Installation:</b> System installation to Standard Novellus BKM</p><br />
</li>
<li class="pro2">
<h3>Downloads</h3>
<ul>
<li><a href="http://csmanufacturing.net/assets/2008/7/11/W_RSB_C1_Classic.pdf">Concept One Classic - PDF</a></li>
</ul>
</li>
<li>
<h3>Pricing Information</h3>
<p>Please call for pricing and manufacturing lead times.</a></p>
</li>
</ul>
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admintag:csmanufacturing.net,2008-05-08:92008-05-08T23:19:00Z2008-07-08T19:45:48ZFeatures
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<h2>Upgrades & Enhancements</h2>
<ul>
<li class="pro2">
<h3>Standard Upgrades and Enhancements</h3>
<ul>
<li>• Micro-Contamination Package.</li>
<li>• AE LF & HF Generators.</li>
<li>• New Generation Process Gas Box</li>
<li><i> Aera 7800 Mfc's.</i></li>
<li><i> Lock out – Tag out</i></li>
<li>• External Heated Pendulum Valve.</li>
<li>• 586 Computer with Flash Drive.</li>
<li>• Digital Pressure/Temperature Control Unit.</li>
<li>• Robot with 70V Motors and OEM 750 Driver Kit.</li>
<li>• Front Flat Panel Touchscreen.</li>
<li>• AC and RF Ceramic Feedthru's.</li>
<li>• Dual Head End Point Detector. </li>
<li>• New Generation Terminal Panel </li>
<li>• Brand New Process Environment – Including but not limited to:</li>
<li> <i> Top Plate</i></li>
<li> <i> Bottom plate</i></li>
<li> <i> Heater block</i></li>
<li> <i> Shower heads</i></li>
<li> <i> Gas Distribution</i></li>
<li> <i> Brand new Ceramics</i></li>
<li> <i> All weldments and all delivery lines.</i></li>
<li>• Brand New Power Distribution</li>
<li> <i> Upgraded Remote</i></li>
<li> <i> Upgraded Main</i></li>
<li> <i> Upgraded Upper and Lower</i></li>
<li>• Customer Specified Configuration.</li>
</ul>
</li>
<li>
<h3>Optional Enchancements</h3>
<ul>
<li>• Cool Station Upgrade</li>
<li><i> Change to plastic cassettes, saves switching cassettes.</i> </li>
<li>• Ferrofluidic Seal Upgrade</li>
<li><i> Improves Reliability & Maintainability</i> </li>
<li>• RF Strap </li>
<li><i> Provides higher availability through less maintenance</i></li>
<li>• Ceramic Bottom Plate</li>
<li><i> Lowers usage due to spindle forks drooping</i></li>
<li>• MCA Heater Block</li>
<li><i> Backside Particle Reduction</i></li>
<li><i> (not process transparent)</i></li>
<li>• Light Tower</li>
<li>• TEOS upgrades available</li></ul>
</li>
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admintag:csmanufacturing.net,2008-05-08:82008-05-08T23:17:00Z2008-07-08T19:10:27ZTechnical
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<h2>Technical Specifications</h2>
<ul>
<li class="pro2">
<h3>Technical Specifications</h3>
<ul>
<li>Film Thickness Range 2,000-20,000Å</li><br />
<li>Within-Wafer 100,125,150mm <1></li>
<li>Thickness Uniformity 200mm <1></li><br />
<li>Wafer-to-Wafer</li>
<li>Thickness Reproducibility <1></li><br />
<li>Run-to-Run</li>
<li>Thickness Reproducibility <1></li>
<li>Refractive Index 1.465 ± 0.015</li><br />
<li>Film Stress</li>
<li>Undoped <1></li>
<li>Compressive</li>
<li>Doped Dopant concentration dependent</li>
<li>Dopant Uniformity ±0.1 wt%</li>
<li>Dopant Reproducibility ±0.2 wt%</li>
<li>Pinholes <0></li>
<li>Particles (1,000º film) <0>0.3µm)</li>
</ul>
</li>
<li>
<h3>Standard Novellus Deposition Parameters</h3>
<ul>
<li>Chemistry SiH</li>
<li>4,N2O,N2,B2H6,</li>
<li>PH3 (5% in N2)</li><br />
<li>Pressure 2.2 Torr</li>
<li>Temperature 400ºC</li>
<li>RF Power 0.4 Watt/cm²</li>
<li>RF Frequency 13.56 MHz</li><br />
<li>Deposition Rate</li>
<li>Undoped 4,400Å/min</li>
<li>Doped 5,500Å/min</li>
</ul>
</li>
<li class="pro2">
<h3>Downloads</h3>
<ul>
<li>Process specifications available upon request.</li>
</ul>
</li>
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admintag:csmanufacturing.net,2008-01-25:62008-01-25T06:19:00Z2009-03-23T22:51:57ZContact
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<h2>CONTACT</h2>
<p>473 Sapena Court, Suite 15<br />
Santa Clara, CA. 95054</p><br />
<p>Phone: 408.855.8595<br />
Fax: 408.885.8598<br />
<a href="info@csmanufacturing.net">info@csmanufacturing.net</a></p><br /><br />
<p><b>Richard Diehl, Presiden</b>t</em><br />
E-Mail: <a href="mailto:richard@csmanufacturing.net">richard@csmanufacturing.net</a><br />
Cell: 408.623.4643
</p><br />
<p><b>Jennifer Diehl, Office Manager</b><br />
E-Mail: <a href="mailto:jennifer@csmanufacturing.net">jennifer@csmanufacturing.net</a><br />
Cell: 408.425.8671</p>
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admintag:csmanufacturing.net,2008-01-25:52008-01-25T06:18:00Z2008-07-08T19:10:54ZCompany
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<h2>About CSM</h2>
<p>Concept Systems Manufacturing, Inc. (CSM) was founded in September 2006 by Richard Diehl in partnership with Novellus Systems. CSM was originated with the sole purpose of building new and refurbishing Concept One Tools with the OEM. It is the only company worldwide that is authorized and licensed by Novellus. </p>
<br />
<p>This unique non-competitive partnership with Novellus provides the link that enables CSM to manufacture Concept One tools of impeccable quality. Our purpose, protocol and standard of excellence is maintained though this relationship. We are continually working with Novellus engineering to produce and implement upgrades in safety, production and serviceability.
</p>
<br />
<p> CSM follows the exacting standard set by Novellus. CSM only uses OEM Novellus parts. There may be a small percentage of refurbished material – However that material is refurbished to new condition by the original manufacturer and is covered under the tool warranty. Every tool is built from the frame up following exact manufacturing protocol from sub-assembly to final test. All of our engineers have 15+ years experience working for Novellus manufacturing. During final test and quality assurance (QA), full protocol is followed, documented, and available for the end user. Though our relationship with Novellus, CSM can also offer authorized programs and extended Novellus warranties.
</p>
<br />
<p>
CSM invites our customers to come by our shop any time and be present during any stage of the build and through-out test. We are a small, proficient and organized company that maintains an open door policy.
</p>
<br />
<p>We are proud that we maintain one goal - <b>To produce the best Novellus Concept One Tool available on the market.</b></p>
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admintag:csmanufacturing.net,2008-01-25:32008-01-25T06:10:00Z2008-05-09T18:50:32ZIndex
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<li><a href="index">Link 2</a></li> |
<li><a href="index">Link 3</a></li> |
<li><a href="index">Link 4</a></li> |
<li><a href="index">Link 5</a></li>
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admintag:csmanufacturing.net,2008-01-25:22008-01-25T05:58:00Z2008-08-25T18:53:33ZHome
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<h1>CSManufacturing &madsh; Concept Systems Manufacturing</h1>
<h2> Novellus Concept One </h2>
<ul>
<li>Novellus</li>
<li>Concept</li>
<li>One Concept 1</li>
<li>NVLS</li>
<li>CVD</li>
<li>Refurbished Novellus Equipment</li>
</ul>
<h3 class="intro">Concept One—150 CVD System</h3>
<h4>Concept One 150mm Base System</h4>
<ul>
<li>Micro—Contamination Package.</li>
<li>Dual Frequency System with AE LF PDX 1400 Generator — CE Mark.</li>
<li>New Generation Process 150mm Gas Box, 9 Channel, Aera 7800 Mfc's.</li>
<li>Standard Slot 150mm Heater Block.</li>
<li>Assy Foot Switch Controller</li>
<li>VCR Gasline Interconnect.</li>
<li>Megapak Power Supply.</li>
<li>Sapphire Window.</li>
<li>One Piece Loadlock Door Shaft.</li>
<li>Standard Front Facia — Aqueous paint.</li>
<li>End Point Detector — Dual Head.</li>
<li>SECS II communications interface.</li>
<li>AE LF & HF Generators.</li>
<li>AC Remote Pump Interface for ACP pumps and with AE LF Generator.</li>
<li>Main System Control Cable CA 99</li>
<li>RF Generator Control Cables for AE Generators</li>
<li>HF RF Cable for 3 KW generator CA 57</li>
<li>LF RF Cable CA 102</li>
<li>Pump Control Cable to be used with ACP type interfaces</li>
</ul>
<h2>Standard Novellus BKM</h2>
<h3 class="intro">Concept One—200 CVD System</h3>
<ul>
<li>Concept One 200mm Base System.</li>
<li>Micro—Contamination Package.</li>
<li>Dual Frequency System with AE LF PDX 1400 Generator — CE Mark.</li>
<li>New Generation Process 200mm Gas Box, 11 Channel, Aera 7800 Mfc's. </li>
<li>Standard Slot 200mm Heater Block.</li>
<li>Assy, Foot Switch Controller</li>
<li>VCR Gasline Interconnect.</li>
<li>Megapak Power Supply.</li>
<li>Sapphire Window.</li>
<li>One Piece Loadlock Door Shaft.</li>
<li>Standard Front Facia — Aqueous paint.</li>
<li>End Point Detector — Dual Head.</li>
<li>AE RFG5500 2.75 KW HF Generator — CE Marked, interlock standard.</li>
<li>AC Remote Pump Interface for ACP pumps and with AE LF Generator.</li>
<li>Main System Control Cable CA 99</li>
<li>RF Generator Control Cables for AE Generators</li>
<li>HF RF Cable for 3 KW generator CA 57</li>
<li>LF RF Cable CA 102</li>
<li>Pump Control Cable to be used with ACP type interfaces</li>
</ul>
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