Novellus Concept One

  • Concept One-150 CVD System


    This is CSM’s standard default configuration. This system is fully refurbished in partnership with Novellus Systems using standard OEM hardware and to meet standard OEM BKM Process. This system or module will perform "equivalent to new".




    Standard Components

    Concept One 150mm Base System.
    Micro-Contamination Package.
    Dual Frequency System with AE LF PDX 1400 Generator - CE Mark.
    New Generation Process 150mm Gas Box, 9 Channel, Aera 7800 Mfc's.
    Standard Slot 150mm Heater Block.
    Assy, Foot Switch Controller - switch is foot activated for closure of the loadlock door.
    VCR Gasline Interconnect.
    Sapphire Window.
    One Piece Loadlock Door Shaft.
    Standard Front Facia - Aqueous paint.
    End Point Detector - Dual Head.
    SECS II communications interface.
    AE LF & HF Generators.
    AC Remote Pump Interface for ACP pumps and with AE LF Generator.
    Main System Control Cable CA 99 - 41 ft.
    RF Generator Control Cables for AE Generators - 20 ft.
    HF RF Cable for 3 KW generator CA 57 - 35 ft.
    LF RF Cable CA 102 - 35 ft.
    Pump Control Cable to be used with ACP type interfaces - 10 ft.


    Upgraded Components

    External Heated Pendulum Valve.
    586 Computer with Flash Drive.
    Pressure/Temperature Control Unit.
    Robot with 70V Motors and OEM 750 Driver Kit.
    Front Flat Panel Touchscreen.
    AC and RF Ceramic Feedthru's.


    The base system does not include certain peripheral and support items, including but not limited to vacuum backing pumps, metrology tools, test wafers, effluent treatment units, chemical/supplies. Base system features listed may be replaced, added to, and/or modified due to customer specific requests. The system depicted may contain modifications and options to the base system.


    Installation: System installation to Standard Novellus BKM


  • Concept One-200 CVD System


    This is CSM’s standard default configuration. This system is fully refurbished in partnership with Novellus Systems using standard OEM hardware and to meet standard OEM BKM Process. This system or module will perform "equivalent to new".




    Standard Components

    Concept One 200mm Base System.
    Micro-Contamination Package.
    Dual Frequency System with AE LF PDX 1400 Generator - CE Mark.
    New Generation Process 200mm Gas Box, 11 Channel, Aera 7800 Mfc's.
    Standard Slot 200mm Heater Block.
    Assy, Foot Switch Controller - switch is foot activated for closure of the loadlock door.
    VCR Gasline Interconnect.
    Megapak Power Supply.
    Sapphire Window.
    One Piece Loadlock Door Shaft.
    Standard Front Facia - Aqueous paint.
    End Point Detector - Dual Head.
    AE RFG5500 2.75 KW HF Generator - CE Marked, interlock standard.
    AC Remote Pump Interface for ACP pumps and with AE LF Generator.
    Main System Control Cable CA 99 - 41 ft.
    RF Generator Control Cables for AE Generators - 20 ft.
    HF RF Cable for 3 KW generator CA 57 - 35 ft.
    LF RF Cable CA 102 - 35 ft.
    Pump Control Cable to be used with ACP type interfaces - 10 ft.


    Upgraded Components

    Upgraded External Heated Pendulum Valve.
    586 Computer with Flash Drive.
    Digital Pressure/Temperature Control Unit.
    Robot with 70V Motors and OEM 750 Driver Kit.
    Front Flat Panel Touchscreen.
    AC and RF Ceramic Feedthru's.


    The base system does not include certain peripheral and support items, including but not limited to vacuum backing pumps, metrology tools, test wafers, effluent treatment units, chemical/supplies. Base system features listed may be replaced, added to, and/or modified due to customer specific requests. The system depicted may contain modifications and options to the base system.


    Installation: System installation to Standard Novellus BKM


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  • Pricing Information

    Please call for pricing and manufacturing lead times.