PEP IRIDIA Sepcifications
Features
- Air-cooled, quartz microwave plasma source in ash configuration
- Water-cooled sapphire microwave plasma source in clean configuration
- High and low temperature processing
- Temperature controlled lamp heating with IR temperature probe
- Dual, in-chamber and downstream endpoint detection system
- 500 W RF source with microprocessor controlled auto-tuning
- 4-MFC gas box
Options
- SECS/GEM
- SMIF arm interface
- 6-MFC gas box
- Water vapor delivery system
Configuration
| Feature | Iridia DL-Sapphire | Iridia DL-Quartz | Iridia D |
|---|---|---|---|
| Water-cooled sapphire microwave plasma source | √ | - | √ |
| Air-cooled quartz microwave plasma source | - | √ | - |
| Directional RF source | √ | √ | √ |
| Lamp wafer heating with closed-loop temperature control | √ | √ | upgrade |
Process
| Typical | Throughput | |
|---|---|---|
| Applications | DL Resist removal DL Implant and damaged resist removal DL,D FEOL and BEOL cleans |
120 - 160 wph 70 - 130 wph 50-85 wph |
| Ash Rate | 4.5 µm/m, Bulk PR removal, DL- Quartz (50% PR removal ,ash step, 6 mm edge exclusion) |
|
| Uniformity | Within wafer ≤ 5% (1 sigma) Wafer-to-wafer ≤ 3% (1 sigma) |
|
| Temperature | Platen: < 90°C Lamps: 150 - 300°C | |
| Microwave Power | 0 - 1800 W 2.45 GHz Forward- and reflected-power readout and forward-power control |
|
| RF Power | 0 - 500 W , auto-tune | |
| Particles | < 0.06 def/cm2, > 0.2 µm |
Reliability
| MTBF | ≥ 300 hr |
| MTTR | ≤ 3 hrs for 80% of down event |
| Uptime (SEMI E10-92 STD | 93% |
Facilities Information
| Footprint (standard configuration) | 48.5” (123 cm) x 74" x (188 cm) x 85” (216 cm) |
| Electrical | 200 - 240 VAC, 200 Amp breaker, 3 Phase, 50/60 Hz, WYE configuration |
| Typical Process Gases | O2, N2, N2/H2, CF4, NF3 up to 6 with optional gas bo |
| Air Exhaust | 200 CFM per chamber |
| Cooling Water | 2.0 GPM per chamber |
| Vacuum | ≥ 250 CFM per chamber plus 1 – 4 CFM @ 25" Hg for robot |
Note: Due to the complexity of customers’ process variations and requirements, the above process performance specification can deviate or be improved. Therefore, customers should submit demo samples to the Applications Lab via their sales person to establish the optimum applicable specifications and conditions. Actual numbers on reliability will depend upon specific support available through contracts, knowledge of people performing P.M., and sufficient consumables and spare parts on-site.
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