Upgrades

C1 UPGRADES

• FerroFluidic Spindle
• Ceramic Bottom Plate
• RF Strap Upgrade
• Megapak Power Supply
• Sapphire Window
• One Piece Loadlock Door Shaft
• SECS II communications interface
• New Generation Terminal Panel
• Micro-Contamination Package
• New Generation Gas Box, with Aera FCPA digital, programmable MFC’S with LOTO's
• External Heated Pendulum Valve
• 586 Computer with Flash Drive
• Digital Pressure/Temperature Control Unit
• Robot with 70V Motors and OEM 750 Driver Kit
• Front Flat Panel Touchscreen
• Side Flat Panel Monitor
• AC and RF Ceramic Feedthru's
• AE Matching Network
• AE Generator
• RF Detector Endpoint System
• Redesigned RF Enclosure with removable panels
• Extended Platform